| 摘要 |
<p>PROBLEM TO BE SOLVED: To reliably prevent liquid from splashing from a cup.SOLUTION: A liquid processing apparatus comprises: supports 70 for supporting a workpiece W: liquid supplying sections 41 and 51 for supplying liquids to the workpiece W supported by the supports 70: a cup 10 for surrounding the workpiece W supported by the supports 70: and a mesh member 15 arranged at an inner surface side of the cup 10. A plurality of projections 11 are arranged between the inner surface of the cup 10 and the mesh member 15 so as to form a predetermined space between the inner surface of the cup 10 and the mesh member 15.</p> |
