| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas laser oscillator having a function which makes possible to make determination on the start of discharge in a short time with reliability.SOLUTION: A gas laser oscillator comprises: a controller which makes an instruction voltage; a laser power source which supplies electric power to a discharge tube according to the instruction voltage; and a voltage detector which detects a voltage applied to the discharge tube. The controller further includes a determination part which makes determination on whether or not the discharge tube has started to discharge based on a rate of change of the voltage detected by the voltage detector when the discharge tube is supplied with electric power according to a stepwise increasing instruction voltage. The determination part is arranged to make determination on whether or not the discharge tube has started to discharge after initial steps of the stepwise increasing instruction voltage including at least a first increasing step.</p> |
