CHARGED PARTICLE BEAM DRAWING APPARATUS, FORMAT CHECK APPARATUS AND FORMAT CHECK METHOD

摘要

A charged particle beam drawing apparatus in an embodiment includes an information generation part to generate encoded information on drawing data having a layered structure and check information on the format check, if the drawing data passes the check by the format check part; an information storage part to store the encoded information and the check information; a code inspection part to inspect the drawing data by using the encoded information in the information storage part, when the drawing data is to be rechecked in the format check based on the check details; an information inspection part to inspect the check information in the information storage part while omitting the format check, if the drawing data passes the inspection by the code inspection part; and a check execution part to execute check with processing details of the format check changed according to the inspection result.

主权项

1. A charged particle beam drawing apparatus comprising:
a format check part configured to perform format check based on check details on drawing data having a layered structure; an information generation part configured to generate encoded information on the drawing data and check information on the format check, if the drawing data passes the check performed by the format check part; an information storage part configured to store the encoded information and the check information generated by the information generation part; a code inspection part configured to inspect the drawing data by using the encoded information stored by the information storage part, when the drawing data is to be rechecked in the format check based on the check details; an information inspection part configured to inspect the check information stored by the information storage part if the drawing data passes the inspection performed by the code inspection part; and a check execution part configured to execute check with processing details of the format check changed according to an inspection result obtained by the information inspection part.