| 摘要 |
<p>Disclosed are a pallet (10) and a plasma machining apparatus. The pallet (10) is used for bearing a machined work-piece (14), and adjusting the temperature of the machined work-piece (14) by means of a heat exchange gas, wherein at least one bearing region of the machined work-piece is formed on the upper surface of the pallet (10); the shape and size of each bearing region of the machined work-piece are corresponding to the machined work-piece (14) to be borne; at least one recess (11) which is recessed towards the lower surface of the pallet is formed in a non-edge region (111) of each bearing region of the machined work-piece; the maximum diameter of a notch of each recess (11) is smaller than the minimum diameter of the borne surface of the machined work-piece (14) to be borne; intake holes (13) are distributed on the bottom surface of the recess (11); and the intake holes (13) are connected to a gas source of the heat exchange gas. The pallet (10) can not only improve the efficiency and uniformity of heat exchange between the heat exchange gas and the machined work-piece (14), but can also reduce the leakage amount of the heat exchange gas.</p> |
