发明名称 MEASURING MACHINE, AND MOVABLE GUIDE MECHANISM OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a measuring machine that has high visibility and can perform accurate measurement, and to provide a movable guide mechanism thereof.SOLUTION: A Y-axis movable frame 22 for moving a probe 120 in the Y-axis direction is formed in an L shape, and its one end is movably supported by one Y-axis direct-acting guide 44 in the Y-axis direction. The other end is floated and supported on a surface plate 14 by an air bearing 70. Thus, the Y-axis movable frame 22 is supported in an oscillatable state about the Y-axis, and deformation such as torsion or deflection of the Y-axis movable frame 22 is prevented.
申请公布号 JP2014206416(A) 申请公布日期 2014.10.30
申请号 JP20130083128 申请日期 2013.04.11
申请人 TOKYO SEIMITSU CO LTD 发明人 KAWAKAMI TETSUJI;OKUBO NOBUHIRO;FUSAYASU KAZUHISA;GOMI KEIICHIRO;FUJITA TAKASHI
分类号 G01B5/00;F16C29/06;F16C32/06 主分类号 G01B5/00
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