WAFER TRANSPORT ROBOT

摘要

An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly.;Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

主权项

1. A wafer transport robot comprising:
a multi-shaft drive unit including at least an inner shaft and an outer shaft which are disposed coaxially; a first parallel link configured by first and second arms which have first ends fixed to the inner shaft and the outer shaft, respectively, and third and fourth arms which are arranged in parallel to the first and second arms, respectively; a second parallel link configured by either one of the third and fourth arms shared as a common arm, a fifth arm parallel to the common arm, a sixth arm pivotally supported at both ends thereof on respective first ends of the common arm and the fifth arm, and a seventh arm pivotally supported at both ends thereof on respective second ends of the common arm and the fifth arm; a handling arm fixed to the fifth arm to be in parallel to the common arm and for placing thereon a wafer; and a plurality of transmission arms rotationally connected to each other for transmitting an operation of the first arm or the second arm to a driven arm so that an angle between the driven arm and the common arm coincides with an angle between the first arm and second arm, the driven arm being one of the sixth arm and the seventh arm and being pivotally supported on the first end of the common arm together with the first arm or the second arm.