CIRCUIT-INCORPORATING PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

The present invention provides a circuit-incorporating photoelectric conversion device and a manufacturing method therefor capable of accurately micro-fabricating a plasmonic filter part because dishing rarely occurs in an insulation layer beneath the plasmonic filter part. A uniform metal layer (31) is provided on an insulation layer (7) upward from wiring layers (11, 12, 13). The metal layer (31) has a plasmonic filter part (32) having periodic openings (32a) for guiding light of a selected wavelength to a first photoelectric conversion element (101), and a shield metal part (33) for shielding light.