发明名称 |
FLEXIBLE SUBSTRATE HOLDER, DEVICE AND METHOD FOR DETACHING A FIRST SUBSTRATE |
摘要 |
A flexible substrate mount for holding a first substrate when the first substrate is being detached from a second substrate, and detachment means for debonding of the second substrate by bending the first substrate. Furthermore, this invention relates to a device for detaching a first substrate from a second substrate in one detachment direction (L) with the following features: a substrate mount for holding the first substrate, said first substrate mount being flexible in the detachment direction (L), a substrate mount for holding the second substrate and detachment means for the debonding of the first substrate from the second substrate as the first substrate bends, and a method of using the same. |
申请公布号 |
EP2795669(A1) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20110808644 |
申请日期 |
2011.12.22 |
申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
WIMPLINGER, MARKUS;BURGGRAF, JÜRGEN;MITTENDORFER, GERALD |
分类号 |
H01L21/67;H01L21/687 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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