摘要 |
<p>A RF generator includes a structure having an input section, an output section, and an opening extending between the input section and the output section, wherein the output section has a first cavity and a second cavity, and wherein the first and second cavities are spaced apart from each other so that they are electromagnetically uncoupled from each other. A method of providing RF energy, includes receiving an electron beam, providing a first RF energy through a first cavity, wherein the first RF energy is generated using the electron beam, and providing a second RF energy through a second cavity, wherein the second RF energy is generated using the electron beam, wherein the first cavity and the second cavity are spaced apart from each other so that they are electromagnetically uncoupled from each other.</p> |