发明名称 MEASUREMENT DEVICE AND MEASUREMENT METHOD
摘要 A measuring device according to the present invention includes a light-sending part sending light in a first direction which is a depth direction of a hollow shape, a conversion part converting a direction of the light into a circumference direction approximately orthogonal to the first direction, a detection part detecting light reflected inside a measuring object, the direction of which is converted by the conversion part, and a shape measurement part measuring an inside shape of the measuring object by obtaining a shift from a reference position according to a detection result of the detection part. Thereby, it is possible to obtain the hollow shape of an object at one time without a need of rotating the object or a light source, and to carry out a highly accurate measurement using a simple device.
申请公布号 EP2093536(A4) 申请公布日期 2014.10.29
申请号 EP20070849805 申请日期 2007.12.07
申请人 NIKON CORPORATION 发明人 AOKI, HIROSHI;KOMATSU, KOICHIRO
分类号 G01B11/24 主分类号 G01B11/24
代理机构 代理人
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