发明名称 |
Buried-type optical input/output devices and methods of manufacturing the same |
摘要 |
Optical input/output (I/O) devices, which include a substrate including a trench, a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide. An upper surface of the photodetector is at a same level as an upper surface of the waveguide. |
申请公布号 |
US8873901(B2) |
申请公布日期 |
2014.10.28 |
申请号 |
US201213494445 |
申请日期 |
2012.06.12 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Kang Pil-Kyu;Bae Dae-Lok;Park Byung-Lyul;Choi Gil-Heyun |
分类号 |
G02B6/12;G02B6/30;G02B6/124;G02B6/42 |
主分类号 |
G02B6/12 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. An optical input/output (I/O) device, comprising:
a substrate including a trench, the trench having a constant width in a first direction and extending in a second direction vertical to the first direction; a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide, wherein an upper surface of the photodetector is at a same level as an upper surface of the waveguide. |
地址 |
Gyeonggi-Do KR |