发明名称 Buried-type optical input/output devices and methods of manufacturing the same
摘要 Optical input/output (I/O) devices, which include a substrate including a trench, a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide. An upper surface of the photodetector is at a same level as an upper surface of the waveguide.
申请公布号 US8873901(B2) 申请公布日期 2014.10.28
申请号 US201213494445 申请日期 2012.06.12
申请人 Samsung Electronics Co., Ltd. 发明人 Kang Pil-Kyu;Bae Dae-Lok;Park Byung-Lyul;Choi Gil-Heyun
分类号 G02B6/12;G02B6/30;G02B6/124;G02B6/42 主分类号 G02B6/12
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. An optical input/output (I/O) device, comprising: a substrate including a trench, the trench having a constant width in a first direction and extending in a second direction vertical to the first direction; a waveguide within the trench of the substrate; and a photodetector within the trench and optically connected to the waveguide, wherein an upper surface of the photodetector is at a same level as an upper surface of the waveguide.
地址 Gyeonggi-Do KR