Method of manufacturing a semiconductor template

摘要

A method for manufacturing a semiconductor template balanced between strains and defects is provided, the method including steps of: preparing a substrate, dividing the substrate into a plurality of first patterned zones and a plurality of second patterned zones, the second patterned zones applied to separate the first patterned zones; selecting a semiconductor with an ideal lattice of a semiconductor buffer layer to be deposited on the substrate; etching a plurality of first microstructures in the first patterned zones according to the semiconductor with the ideal lattice, the first microstructures and the semiconductor with the ideal lattice following a lattice-structure matching relationship, discovered by strain-traction experiments, making the substrate a multi-patterned substrate; and depositing the semiconductor buffer layer having the semiconductor with the ideal lattice on the multi-patterned substrate to manufacture a semiconductor template which is balanced between strains and defects.

主权项

1. A method for manufacturing a semiconductor template balanced between strains and defects, discovered by strain-traction experiments in a preferred embodiment, the method comprising steps of:
(a) preparing a substrate, dividing the substrate into a plurality of first patterned zones and a plurality of second patterned zones, the second patterned zones applied to separate the first patterned zones; (b) selecting a semiconductor with an ideal lattice of a semiconductor buffer layer to be deposited on the substrate; (c) etching a plurality of first microstructures in the first patterned zones according to the semiconductor with the ideal lattice, the first microstructures and the semiconductor with the ideal lattice following a lattice-structure matching relationship, discovered by strain-traction experiments, making the substrate a multi-patterned substrate; and (d) depositing the semiconductor buffer layer having the semiconductor with the ideal lattice on the multi-patterned substrate to manufacture a semiconductor template balanced between strains and defects; wherein when the deposition of the semiconductor buffer layer follows the lattice-structure matching relationship, discovered by strain-traction experiments in the preferred embodiment, it is expected that the semiconductor buffer layer is affected by the difference between a strain-traction force in the semiconductor with the ideal lattice on the first patterned zones and in a semiconductor with a lattice on the second patterned zones; owing to the lower lattice-constant mismatch in the semiconductor buffer layer grown on the first microstructures, the residual strains in the semiconductor buffer layer are accumulated toward the outside of the first patterned zones; as a result, the strains in the semiconductor buffer layer on the first patterned zones are relaxed.