DEPOSITION APPARATUS, METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE SAME

摘要

The present invention provides a deposition device, a method for manufacturing an organic light emitting display device using the same, and an organic light emitting display device manufactured by the same. The deposition device, which can deposit a deposition material in an exact position during a deposition process, comprises: a deposition unit including a plurality of deposition assemblies, which deposit a material on a substrate by being spaced apart from the substrate by predetermined intervals while a first transfer unit transfers the substrate fixed to a moving unit, and a chamber. Each of the deposition assemblies includes: a patterning slit sheet arranged opposite to a deposition source nozzle unit and having a plurality of patterning slits in one direction; a position information acquisition unit to acquire position information about the position of the substrate on the moving unit transferred by the first transfer unit; and a sheet stage to adjust the position of the patterning slit sheet relative to the substrate on the moving unit transferred by the first transfer unit according to the position information acquired by the position information acquisition unit.