Method of forming metal pattern and method of manufacturing display substrate having the same

摘要

A method of forming a metal pattern includes forming a precursor layer including a metal precursor on a substrate, irradiating a light on the precursor layer to form a metal seed layer having a predetermined pattern, and electroless-plating the metal seed layer to form a metal pattern layer.

主权项

1. A method of forming a metal pattern, the method comprising:
forming a precursor layer including a metal precursor, on a substrate; irradiating a light on the precursor layer to form a metal seed layer comprising a plurality of discrete patterns arranged in a predetermined pattern on the substrate, comprising:
a light source irradiating the light in the predetermined pattern on the precursor layer to expose and reduce the precursor layer; andthe same light source annealing the reduced precursor layer by the light; and electroless-plating the metal seed layer discrete patterns to form a metal pattern layer comprising a plurality of discrete patterns each formed from a group of the metal seed layer discrete patterns.