发明名称 |
Particle detecting device evaluating system and particle detecting device evaluating method |
摘要 |
A particle detecting device evaluating system having a test chamber provided, in one face thereof, with a plurality of gas intake vents, where respective particle detecting devices are provided; an injecting device for injecting particles into the test chamber; a light sheet forming device for forming a light sheet within the test chamber; and an imaging device for imaging particles made visible by the light sheet. |
申请公布号 |
US8869594(B2) |
申请公布日期 |
2014.10.28 |
申请号 |
US201213644960 |
申请日期 |
2012.10.04 |
申请人 |
AZBIL Corporation |
发明人 |
Yamasaki Shinsuke |
分类号 |
G01N21/01;G01N15/06;G01N21/53;G01N15/00 |
主分类号 |
G01N21/01 |
代理机构 |
Troutman Sanders LLP |
代理人 |
Troutman Sanders LLP |
主权项 |
1. A particle detecting device evaluating system comprising:
a test chamber provided with a face having a plurality of gas intake vents each connected to respective particle detecting devices; an injecting device injecting particles into the test chamber; a light sheet forming device forming a light sheet within the test chamber, along the plurality of the gas intake vents; an imaging device imaging the particles made visible by the light sheet; a measuring portion measuring quantities of particles made visible at a plurality of locations corresponding to the respective plurality of the gas intake vents; and a distribution calculating portion calculating distributions of the quantities of particles measured at the plurality of the locations. |
地址 |
Tokyo JP |