发明名称 Particle detecting device evaluating system and particle detecting device evaluating method
摘要 A particle detecting device evaluating system having a test chamber provided, in one face thereof, with a plurality of gas intake vents, where respective particle detecting devices are provided; an injecting device for injecting particles into the test chamber; a light sheet forming device for forming a light sheet within the test chamber; and an imaging device for imaging particles made visible by the light sheet.
申请公布号 US8869594(B2) 申请公布日期 2014.10.28
申请号 US201213644960 申请日期 2012.10.04
申请人 AZBIL Corporation 发明人 Yamasaki Shinsuke
分类号 G01N21/01;G01N15/06;G01N21/53;G01N15/00 主分类号 G01N21/01
代理机构 Troutman Sanders LLP 代理人 Troutman Sanders LLP
主权项 1. A particle detecting device evaluating system comprising: a test chamber provided with a face having a plurality of gas intake vents each connected to respective particle detecting devices; an injecting device injecting particles into the test chamber; a light sheet forming device forming a light sheet within the test chamber, along the plurality of the gas intake vents; an imaging device imaging the particles made visible by the light sheet; a measuring portion measuring quantities of particles made visible at a plurality of locations corresponding to the respective plurality of the gas intake vents; and a distribution calculating portion calculating distributions of the quantities of particles measured at the plurality of the locations.
地址 Tokyo JP