| 摘要 |
PROBLEM TO BE SOLVED: To improve the working efficiency of the correction of the coordinates of a point where a probe is allowed to perform probing or the correction of the content of inspection steps.SOLUTION: A data processor includes a storage part and a processing part. The storage part stores common coordinate data indicating positions of points in a reference circuit board A with coordinates with a reference position P1 as an original point and common step data indicating the execution order of inspection steps to be executed to the reference circuit board A and probing object points for each of circuit boards (A to D), and stores relative position data indicating the relative positional relationship of the mutual circuit boards and relative order data indicating an order difference between the execution order of the whole inspection steps and the execution order of each circuit board. The processing part corrects all the corresponding data when a correcting operation to the data stored for each circuit board is performed. |
