| 摘要 |
PROBLEM TO BE SOLVED: To provide a moisture sensitive film for a humidity sensor, which is able to etch in a semiconductor etching process, by improving solubility in aqueous solution.SOLUTION: A moisture sensitive film 17 is composed of polyimide formed by synthesizing: an organic compound having an amino group at each end and also having a phenyl group bonded to a main structure in one or two chains; and an organic compound in which each end of a phenyl group bonded to the main structure in one or more straight chains is carboxylic acid dianhydride. The polyimide is composed by repeating a basic structure in which the organic compound of the amino group at each end contains two phenyl group and an imido group bonded to this phenyl group. Thus, the two phenyl groups and the change of the imido group into the amido group by the impregnation of the polyimide film with a water solution cause hydroxy groups to approach each other. Consequently, areas with high solubility in water overlap each other, thereby improving solubility in polyimide. |
