| 摘要 |
PROBLEM TO BE SOLVED: To reduce start torque while suppressing the deterioration of the positioning accuracy of a stage of a stable operation.SOLUTION: A deflective meshing type gear device 100 comprises: an excitation body 104; an outer tooth gear 120 which is deflected and deformed by the rotation of the excitation body 104, and has elasticity; an exciting body bearing 110 arranged between the excitation body 104 and the outer tooth gear 120; and an inner tooth gear 130 with which the outer tooth gear 120 internally contacts, and is engaged, and which has rigidity. A linear expansion coefficient α1 of the excitation body 104 is smaller than a linear expansion coefficient α4 of the inner tooth gear 130, and pilot pressure between the outer tooth gear 120 and the inner tooth gear 130 becomes large accompanied by a rise of a temperature. |
