| 摘要 |
PROBLEM TO BE SOLVED: To detect even minute defects that could not be detected in a detection method using a conventional detector, by maintaining high positional accuracy and classification accuracy.SOLUTION: In a method for inspecting a defect on the surface of a disk as a sample, of reflected light and scattered light in a first direction from a disk, mirror reflection light and scattered light from the disk are separated, this separated scattered light is detected by a detector formed by arranging a plurality of light receiving elements in one dimension. The disk is rotated. Also, the disk is moved in a direction perpendicular to the central axis of the rotation so that images in the same area on the disk are detected more than one time using the detector formed by arranging a plurality of light receiving elements in one dimension. Minute defects on the disk are rendered tangible by adding signals obtained by detecting defects on the disk through detecting images in the same area on the disk more than one time. The defects on the disk are categorized using information about the tangible minute detects on the disk and signals that have detected reflected light and scattered light in the second direction. |
