SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

In a manufacturing method of a semiconductor device, a semiconductor chip is sealed with a resin, and then a laser is applied to remove the resin so that a part of the semiconductor chip is exposed. The semiconductor chip is made of a material that has a lower absorptivity of the laser than the resin and is not melted by the laser. The laser has a wavelength that passes through the semiconductor chip and has a lower absorptivity in the semiconductor chip than in the resin. The laser is applied to the resin from a side adjacent to one of plate surfaces of the semiconductor chip, so that the resin sealing the one of the plate surfaces is sublimated and removed and at least a part of the resin sealing the other of the plate surfaces is subsequently sublimated and removed by the laser having passed through the semiconductor chip.

主权项

1. A method of manufacturing a semiconductor device, the method comprising:
preparing a semiconductor chip having a plate shape; sealing the entirety of the semiconductor chip with the resin; and sublimating and removing the resin by applying a laser to the resin to expose at least a part of the semiconductor chip, wherein in the preparing, a semiconductor chip made of a material that has a lower absorptivity of the laser than the resin and is not melted by the laser is prepared as the semiconductor chip, in the sublimating and removing, a laser having a wavelength that passes through the semiconductor chip and has a lower absorptivity in the semiconductor chip than in the resin is applied as the laser, the laser is applied to the resin from a side adjacent to one of plate surfaces of the semiconductor chip so that the resin sealing the one of the plate surfaces is sublimated and removed, and the laser is subsequently applied to pass through the semiconductor chip to the other of the plate surfaces of the semiconductor chip so that at least a part of the resin sealing the other of the plate surfaces is sublimated and removed.