| 摘要 |
[Problem] To provide a lower-cost and more compact magnetic bearing device by omitting the DC/DC converter that was conventionally used to obtain a control power supply voltage of the magnetic bearing device, and to provide a vacuum pump provided with said magnetic bearing device. [Solution] This magnetic bearing device is provided with a position detection means which detects the radial position and the axial position of a rotating body, a magnetic bearing means which by means of an electromagnet controls the radial position and the axial position on the basis of the radial position and the axial position detected by the position detection means, an excitation circuit which includes a switching element for connecting and disconnecting the electromagnet and the power source, an electromagnet current detection means which detects as a signal the current in the electromagnet, a power supply voltage detection means which detects as a signal the voltage of the power supply, and a pulse width calculation means which, for each timing, calculates the pulse width for pulse-controlling the switching element, wherein the pulse width is calculated on the basis of the voltage of the power supply detected by the power supply voltage detection means and the current detected by the electromagnet current detection means. |
