| 发明名称 |
Micro Electro Mechanical Systems Device and Apparatus for Compensating Tremble |
| 摘要 |
Disclosed are a micro electro mechanical systems (MEMS) device and an apparatus for compensating for a tremble. The MEMS device includes a substrate; a driven member moving relative to the substrate; an elastic member connected to the driven member and the substrate; a driving member fixed to the substrate for driving the driven member; and a dynamic stopper fixed to the substrate and latched to the driven member. |
| 申请公布号 |
US2014313355(A1) |
申请公布日期 |
2014.10.23 |
| 申请号 |
US201214367107 |
申请日期 |
2012.11.07 |
| 申请人 |
LG INNOTEK CO., LTD. ;GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
Park Hyun Kyu;Moon Seung Hwan;Lee Jong Hyun |
| 分类号 |
H02N1/00;H04N5/232 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a substrate; a driven member moving relative to the substrate; an elastic member connected to the driven member and the substrate; a driving member fixed to the substrate for driving the driven member; and a dynamic stopper fixed to the substrate and latched to the driven member. |
| 地址 |
Seoul KR |
