发明名称 Formation of gallium oxide nanowire using atomic layer deposition
摘要 The present invention relates to a method for forming a gallium oxide nanowire using an atomic layer deposition method. The present invention includes the steps of: applying a gallium precursor to a substrate; and applying an oxide precursor to the substrate after the gallium precursor is applied to the substrate.
申请公布号 KR101452976(B1) 申请公布日期 2014.10.22
申请号 KR20120063701 申请日期 2012.06.14
申请人 发明人
分类号 H01L21/205;H01L21/316 主分类号 H01L21/205
代理机构 代理人
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