发明名称 パターン状の絶縁性微粒子膜およびその製造方法ならびにそれを用いた電子部品、マイクロマシン、光学部品
摘要 <p>This invention provides a patterned single layer insulating fine particle film, comprising a patterned single layer of insulating fine particles arranged on a surface of any desired base material without sacrificing the function inherent in the insulating fine particles, and a patterned insulating fine particle built-up film comprising a plurality of layers built up on top of each other, and a process for producing these films. In the patterned insulating fine particle films (1, 3), a single insulating fine particle layer comprising arranged reactive fine particles (42) covered with a film formed of a first coupling reaction group-containing first coupling agent, which forms a bond upon a coupling reaction with the first functional group, is bonded and fixed through a bond formed by the coupling reaction onto the surface of a base material (14) covered with a patterned film formed of a first functional group-containing first film compound. Alternatively, fine particles (34) and reactive fine particles (42) covered with a film formed of a film compound reactive with the first coupling reaction group are further alternately bonded and fixed thereonto.</p>
申请公布号 JP5611503(B2) 申请公布日期 2014.10.22
申请号 JP20070060363 申请日期 2007.03.09
申请人 发明人
分类号 H01L21/312;B01J19/00;B32B5/16;B81B5/00;B81C99/00 主分类号 H01L21/312
代理机构 代理人
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