<p>Provided is a substrate defect detecting method. The substrate defect detecting method includes: a step of emitting an electronic beam to a first area of a substrate; a step of emitting the electronic beam to a second area electrically connected to the first area; and a step of detecting a secondary electron emitted from the second area.</p>
申请公布号
KR20140123342(A)
申请公布日期
2014.10.22
申请号
KR20130040590
申请日期
2013.04.12
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SUN, JONG CHEON;KIM, HYUNG SEOP;SUNWOO, HEE WON;LEE, BYOUNG HO;IHM, DONG CHUL;CHIN, SOO BOK