Systems and methods for defect detection using a whole raw image

摘要

An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus including at least a camera for obtaining an image of the electronic circuit and an image processing system. The image processing system receives the image of the electronic circuit from the camera, performs a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit, identifies a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit, computes one or more local defect-free reference (golden) images of the electronic circuit using at least one selected area in the closest proximity of the identified candidate defect and determines the defect in the electronic circuit using one or more computed local golden images of the electronic circuit, the image of the electronic circuit.

主权项

1. An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus comprising:
a. a camera for obtaining an image of the electronic circuit; and b. an image processing system comprising a processing unit and a memory, the image processing system being configured to: i. receive the image of the electronic circuit from the camera; ii. perform a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit; iii. identify a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit; iv. compute one or more local defect-free reference images of an area of the electronic circuit using at least one selected image area containing no defects in the proximity of the identified candidate defect; and v. determine the defect in the electronic circuit using the computed defect-free reference image of the electronic circuit and the image of the electronic circuit.