发明名称 DEVICE AND PROGRAM FOR FLOW RATE CONTROL
摘要 <p>A flow control apparatus and a program are disclosed herein. A flow control apparatus includes a piezoelectric element coupled to a valve element configuring a flow regulating valve and that works the valve element to regulate a flow, a driving circuit that applies a voltage to the piezoelectric element to drive the piezoelectric element, an accepting means for accepting a target flow, and an output means for outputting a signal corresponding to the voltage applied to the piezoelectric element to the driving circuit, to change the flow so as to coincide with the target flow. When the target flow is changed, the output means transiently outputs a signal corresponding to a voltage value different from a target voltage value corresponding to the target flow after the change, and then the output means outputs a signal corresponding to a voltage change converging at the target voltage value.</p>
申请公布号 KR20140122743(A) 申请公布日期 2014.10.20
申请号 KR20147024492 申请日期 2013.01.31
申请人 HITACHI METALS, LTD. 发明人 OHTSUKI HARUAKI;SONODA MASASHI
分类号 G05D7/06;G05B11/36 主分类号 G05D7/06
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