Arrangement for the Handling of a Liquid Metal for Cooling Revolving Components of a Radiation Source Based on a Radiation-Emitting Plasma

摘要

An arrangement for handling a liquid metal for cooling revolving components of a radiation source based on a radiation-emitting plasma has the handling arrangement for the liquid metal comprises a reservoir of liquid metal in a vessel, a tempering device for adjusting the temperature moderately above the melting point of the metal, a pump unit for moving the liquid metal in circulation. The handling unit containing the reservoir and the pump unit is provided for transporting the metal into a separated source module via a feed pipe and a return pipe for guiding highly heated metal back from the source module into the reservoir. The return pipe is formed as a straight pipe slightly inclined to the reservoir to guide the heated metal back by action of gravity in a substantially laminar flow.

主权项

1. An arrangement for handling a liquid metal for cooling a revolving component of a plasma-based radiation source, the arrangement comprising:
a source module for generating radiation-emitting plasma; a vessel for supplying the liquid metal to the source module via a feed pipe and a return pipe for guiding the liquid metal in circulation through the source module, wherein the vessel is partly filled with the metal a tempering unit for adjusting the temperature of the liquid metal in the vessel to a temperature higher than the melting point of the metal; a handling unit comprising a reservoir of the liquid metal in the vessel and a pump unit; the pump unit for circulating the liquid metal from the handling unit into the source module, via the feed pipe, and from the source module via the return pipe back into the handling unit with the reservoir; wherein the return pipe is formed as a straight inclined pipe at a gradient relative to the reservoir to guide the heated metal into the reservoir in a substantially laminar flow.