发明名称 WORKPIECE REFERENCING SYSTEM FOR AND METHOD OF REFERENCING WORKPIECES SUPPORTED BY A WORKPIECE CARRIER
摘要 A workpiece referencing system and method, the system comprising : a workpiece support assembly for supporting a plurality of workpieces, wherein the support assembly comprises a support platform and a plurality of support members which are disposed to the support platform, each support member being configured to support an individual workpiece; and a workpiece referencing assembly for referencing the workpieces, as supported by the support assembly, to predetermined positions; wherein the support members each comprise a body which includes a support surface which supports a workpiece and a resilient coupling which resiliently couples at least an upper part of the body relative to the support platform, such that the at least part of the body is displaceable relative to the support platform from a first, unbiased position to a second, biased reference position by operation of the referencing assembly, and, when released, the at least part of the body returns to the first, unbiased position.
申请公布号 WO2014166956(A1) 申请公布日期 2014.10.16
申请号 WO2014EP57076 申请日期 2014.04.08
申请人 DTG INTERNATIONAL GMBH 发明人 HARRIS, TOM;BENNETT, RICKY
分类号 H01L21/68 主分类号 H01L21/68
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