| 摘要 |
PURPOSE: A screen printing apparatus which uses a wireless optical signal and wireless power is provided to perform an inspection process and screen printing process together in one apparatus, thereby improving productivity. CONSTITUTION: A loading part loads a wafer. A wireless power transmission part(120) wirelessly supplies power to the wafer. An align part(130) aligns the wafer using a wireless optical signal. A test part(140) performs an electrical inspection with respect to a plurality of semiconductor chips arranged on the wafer using the wireless optical signal. A printing part applies a solder paste on the wafer. An unloading part unloads the wafer. |
