| 摘要 |
A method of detecting a deviation of a condition of a plurality of regions of a substrate using compressive sensing is disclosed. The method includes applying light, such as a 636.2nm pigtailed fibre coupled laser 12, to the plurality of regions 20 and detecting an interaction of the light with the plurality of regions. From the interaction, the deviation of a condition of the plurality of regions is detected. The method can include applying a sequence of patterns of light. The patterns of light may include binary random matrices and/or a set series of patterns from the Hadamard set matrix. The desired condition may be uniformity or a uniform performance. Detecting an interaction of the light may include detecting a reflectivity and/or transmittance of the plurality of regions. Detecting a deviation may include detecting spatial defects in the plurality of regions. |
