| 摘要 |
An automated material handling system comprising:
a fixed shelf (732) configured to hold a cassette pod (710,810); and
an overhead hoist transport subsystem (704,804) including an overhead transport vehicle (705,805) mounted with an overhead hoist (831), the overhead hoist (831) including a translating stage (833) capable of laterally moving and a hoist gripper (731,835) coupled to the translating stage (833) and capable of moving laterally with a lateral movement of the translating stage (833) and moving vertically by the hoist gripper (731,835) itself, the hoist gripper (731,835) being configured to grip the cassette pod(710,810), the overhead transport vehicle(705,805) being configured to move in a suspended manner along a suspended track(708,808) defining a predetermined route running adjacent to the fixed shelf(732) under a state in which the cassette pod(710,810) is being gripped by the hoist gripper (731,835), and being mounted with the overhead hoist (831) at a lower position than the suspended track(708,808). |
