N-acyl-β-lactam derivative, macromolecular compound, and photoresist composition

摘要

Provided are N-acyl-β-lactam derivatives represented by the following general formula, from which a photoresist composition capable of controlling an acid diffusion length to be short is obtained; a polymer obtained by polymerizing the N-acyl-β-lactam derivative represented by the following general formula as one of starting materials; and a photoresist composition containing the polymer,;
where the structural variables are as defined herein.

主权项

1. An N-acyl-β-lactam derivative represented by formula (1):wherein
R1 represents a hydrogen atom, a methyl group, or a trifluoromethyl group; W represents an alkylene group having a carbon number of from 1 to 10 or a cycloalkylene group having a carbon number of from 4 to 10; n represents 1; and each of R2, R3, R4, and R5 independently represents a hydrogen atom, an alkyl group having a carbon number of from 1 to 5, a cyclic hydrocarbon group having a carbon number of from 3 to 10, or an acyloxy group having a carbon number of from 2 to 6, provided that R3 and R4 are connected to each other to form a substituted or unsubstituted ring 2) having a ring forming atom number of from 4 to 10, said ring 2) optionally comprising an oxygen atom.