Inertial force sensor

摘要

An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations.

主权项

1. An inertial force sensor comprising:
a detector element including
a weight,a coupling portion extending along a plane and supporting the weight,a fixing portion holding the weight via the coupling portion, anda detector detecting angular velocities about at least two axes non-parallel to each other; a first supporting body supporting the detector element; and a case holding the detector element via the first supporting body, wherein the first supporting body extends in parallel with the plane from the detector element, and bends at a first bending portion in a direction away from the plane, and wherein a length of a portion of the first supporting body from the first bending point to the case when projected onto the plane is larger than a length of the portion of the first supporting body in a direction perpendicular to the plane.