Patterning of ultra-low refractive index high surface area nanoparticulate films

摘要

A method for forming a nanoporous film pattern on a substrate comprising imparting differential surface energy to a surface of a substrate to define first areas having a first surface energy conducive to maintenance of a nanoporous film thereon and second areas having a second surface energy non-conducive to maintenance of a nanoporous film thereon, said first and second areas defining a differential surface energy pattern on the substrate; depositing a nanoporous film precursor onto the differential surface energy pattern; and curing the nanoporous film precursor to form the nanoporous film pattern.

主权项

1. A method for forming a nanoporous film pattern on a substrate comprising:
depositing a PMSSQ polymer film on a surface of a substrate; imparting differential surface energy to the film surface of the substrate to define first areas having a first surface energy conducive to maintenance of a nanoporous film thereon and second areas having a second surface energy non-conducive to maintenance of a nanoporous film thereon, said first and second areas defining a differential surface energy pattern on the substrate; depositing a nanoporous film precursor onto the differential surface energy pattern and forming a nanoporous precursor film over the differential surface energy pattern comprising the first areas having the first surface energy and the second areas having the second surface energy; and curing the nanoporous film precursor to form the nanoporous film pattern.