DIGITAL EXPOSURE DEVICE USING GLV AND DIGITAL EXPOSURE DEVICE USING DMD

摘要

A digital exposure device using GLV includes a stage mounting a substrate and moving in the scanning direction, a diffraction grating light valve, an optical system, and a control unit. The diffraction grating light valve includes a pair of ribbons, and provides a first light. The optical system reduces the first light, and supplies the light as a second light. The control unit controls the width of the patterns in the scanning direction, and the width of the patterns in the perpendicular direction to the scanning direction is to be smaller than the conventional ones. A digital exposure device using DMD includes a stage mounting a substrate, a first head, a second head, and a DMD control unit. The first and second heads irradiates spot beams produced by modulating the supplied light on the substrate. The DMD control unit controls the spot beams reflected from the first head and the spot beams reflected from the second head to have a constant size, and controls the energy to be constant.