Deposition Chamber of Apparatus for Moving Sensor,申请号KR20130028827-传众专利搜索

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发明名称	Deposition Chamber of Apparatus for Moving Sensor
摘要
申请公布号	KR101449447(B1)	申请公布日期	2014.10.14
申请号	KR20130028827	申请日期	2013.03.18
申请人		发明人
分类号	H01L51/56;H05B33/10	主分类号	H01L51/56
代理机构		代理人
主权项
地址

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