| 摘要 |
The present invention relates to a method for manufacturing a nano/micro hybrid structure. The method for manufacturing a nano/micro hybrid structure of the present invention comprises a first pattern layer lamination step of laminating a first pattern layer on a substrate; a nanomask applying step of applying a nanomask made of nanomaterials on the first pattern layer; a second pattern layer lamination step of laminating a second pattern layer on the first pattern layer and nanoparticles; an arranging step of arranging the micromask with the pattern width of a microscale in the upper part of the second pattern layer; and a patterning step of patterning the first pattern layer and the second pattern layer, using the nanomask and the micromask. Therefore, according to the present invention, provided is the method for manufacturing a nano/micro hybrid structure, which facilitates the manufacture of a hybrid structure where a nanoscale structure and a microscale structure are mixed through a single patterning process. |
