DEVICE FOR APPLICATION OF HOMOGENEOUS SMOOTH THIN FILMS OF DIFFERENT MATERIALS ON SOLID SUBSTRATES

摘要

FIELD: process engineering.SUBSTANCE: invention relates to production of superconducting thin films and can be used in production of superconductors to superconducting electric power transmission cables operated at liquid nitrogen temperatures. Proposed thin film applicator by pulsed laser evaporation comprises high-power pulse laser, common optical system to focus laser radiation to target and vacuum chamber. The latter accommodates target assembly, butterfly filter and substrate assembly. Substrate is composed of long metal tape on coil with transport mechanism while butterfly filter is composed by rotary disc with evaporated matter passages. Target assembly allows target replacement at film application to produce laminar structures without substrate removal from vacuum to air.EFFECT: production of homogeneous smooth thin films of different materials on long metal tapes.2 cl, 2 dwg