| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently reduce a threading dislocation present in germanium.SOLUTION: An irradiation control method, in one example of embodiment, comprises a heating step of irradiating germanium provided on a discretionary surface of a substrate with a laser to heat the germanium to a discretionary temperature lower than the melting point thereof. The irradiation control method, in one example of embodiment, also includes a control step of exerting control so that the irradiation with the laser is repeated. The irradiation control method, in one example of embodiment, also irradiates the germanium with the laser to heat the germanium while, for example, heating the substrate to a temperature in the range from room temperature to 500°C inclusive.</p> |
