| 摘要 |
<p>Apparatus for use in an inline substrate processing tool are provided herein. In some embodiments, a window assembly for use in an inline substrate processing tool may include a window body having an inner surface and an outer surface, the window body including a central translucent portion configured to pass radiant heat emitted from a radiant heat lamp through the central translucent portion, and a surface treated portion disposed about the central translucent portion and disposed on each of the inner and outer surfaces, the surface treated portion configured to minimize total internal reflections of the radiant heat emitted from the radiant heat lamp, and one or more molded seals disposed proximate an outer edge of the window body and on each of the inner and outer surfaces of the window body.</p> |
