发明名称 MAGNETIC FIELD PROBER
摘要 <p>PROBLEM TO BE SOLVED: To provide a magnetic field prober having high measurement accuracy which can apply a magnetic field from a magnetic field application device to a magnetic body device with high accuracy.SOLUTION: A magnetic field prober 1A(1) comprises: a magnetic field application device 3 having a magnetic field applying means 2; a probe card 6 having a probe pin 4; a stage 7 which is disposed underside of the magnetic applying means 2 and on which an object 20 to be measured is mounted; and a guide 8 which holds the probe card 6 so as to be almost parallel to one plane of the stage 7 between the magnetic field applying means 2 and the stage 7. A pair of magnetic field applying means 2 configuring a group can form a magnetic field which is warped so that the lowest part is positioned on the lower side of the middle part between the pair of magnetic field applying means 2. The tip of each probe pin 4 of the probe card 6 is disposed at a position which is inside a magnetic field formed in a curved shape between the couple of magnetic field applying means 2.</p>
申请公布号 JP2014195097(A) 申请公布日期 2014.10.09
申请号 JP20140097231 申请日期 2014.05.08
申请人 FUJIKURA LTD 发明人 ITOI KAZUHISA;AIZAWA TAKUYA;NAKAO SATORU
分类号 H01L21/66;G01R31/302 主分类号 H01L21/66
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