| 摘要 |
PROBLEM TO BE SOLVED: To provide a safe pressure sensor that prevents damage due to a high pressure even when used in detecting a pressure of a flow channel and the like through which high-pressure coolant such as COand the like passes.SOLUTION: A pressure sensor 1 comprises: a pressure detection element 2; a base 4 to the inner surface of which the pressure detection element is fixed; a reception member 5 that is disposed to face the base; a diaphragm 6 that is held between the base and the reception member; a holding member 22 that is a holding member holding the base and the reception member in a state where the base and the reception member holds the diaphragm so as to prevent the base and the reception member from being separated from each other, and is welded and joined to any one of the base and the reception member in a state where a load is applied in a direction where the base and the reception member are mutually pressed; and a liquid that is filled in a space between the base and the diaphragm. A pressure in the space between the reception member and the diaphragm is transmitted to the pressure detection element via the diaphragm and the liquid. |
