发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE WITH FIRST AND SECOND GATES OVER BURIED BIT LINE
摘要 A semiconductor device and a method for manufacturing the same are provided. The method includes forming a cell structure where a storage node contact is coupled to a silicon layer formed over a gate, thereby simplifying the manufacturing process of the device. The semiconductor device includes a bit line buried in a semiconductor substrate; a plurality of gates disposed over the semiconductor substrate buried with the bit line; a first plug disposed in a lower portion between the gates and coupled to the bit line; a silicon layer disposed on the upper portion and sidewalls of the gate; and a second plug coupled to the silicon layer disposed over the gate.
申请公布号 US2014302651(A1) 申请公布日期 2014.10.09
申请号 US201414308182 申请日期 2014.06.18
申请人 SK HYNIX INC. 发明人 PARK Hyung Jin
分类号 H01L29/66;H01L27/115 主分类号 H01L29/66
代理机构 代理人
主权项
地址 Icheon KR