METHOD OF FABRICATION OF AN ARRAY OF GRADED REFRACTIVE INDEX MICROLENSES INTEGRATED IN A IMAGER SENSOR

摘要

Methods and devices that incorporate microlens arrays are disclosed. An image sensor includes a pixel layer and a dielectric layer. The pixel layer has a photodetector portion configured to convert light absorbed by the pixel layer into an electrical signal. The dielectric layer is formed on a surface of the pixel layer. The dielectric layer has a refractive index that varies along a length of the dielectric layer. A method for fabricating an image sensor includes forming an array of microlenses on a surface of the dielectric layer, emitting ions through the array of microlenses to implant the ions in the dielectric layer, and removing the array of microlenses from the surface of the dielectric layer.

主权项

1. A method for fabricating an image sensor, the image sensor comprising a pixel layer and a dielectric layer, the method comprising the steps of:
forming an array of microlenses on a surface of the dielectric layer; emitting ions through the array of microlenses to implant the ions in the dielectric layer; and removing the array of microlenses from the surface of the dielectric layer.