DIRECT INJECTION PHASE CHANGE TEMPERATURE CONTROL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a thermal control unit that realizes adequate temperature control of devices under test.SOLUTION: A thermal control unit (TCU) 10 for controlling temperature of a device under test (DUT) includes a sealed evaporation chamber (gasification chamber) 45 disposed in the thermal control unit (TCU) 10 and configured with a refrigerant inlet and a refrigerant outlet; and at least one surface engaged thermally with the device under test and configured to conduct heat to the evaporation chamber (gasification chamber) 45.