| 摘要 |
This capacitance type sensor (10) is provided with a moveable electrode (110), a support (120), beam members (130), fixed electrodes (141, 180), a detector unit (200), and a correction unit (300). The beam members (130) function as springs to attach the moveable electrode (110) in moveable fashion to the support (120). The detector unit (200) detects changes in capacitance arising between the moveable electrode (110) and the fixed electrodes (141, 180). The correction unit (300) corrects the detected result from the detector unit (200) and generates an acceleration signal indicating acceleration. |
