发明名称 |
REINFORCEMENT RING FOR CARRIER HEAD |
摘要 |
<p>A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter potion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical.</p> |
申请公布号 |
WO2014163735(A1) |
申请公布日期 |
2014.10.09 |
申请号 |
WO2014US13033 |
申请日期 |
2014.01.24 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LEIGHTON, JAIME, STUART;MEYER, STACY;PAIK, YOUNG, J. |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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