| 摘要 |
<p>An objective of the present invention is to provide a vacuum pump having an abatement function. According to the present invention, an amount of air that is sufficient to sufficiently dilute exhaust gas and fuel is supplied in vortex and combusted so that powder as it is can be discharged without any treatment byproduct melting or attachment into an abatement section. In the vacuum pump (1) according to the present invention, the abatement section (10) is disposed at an air discharge port of the vacuum pump (1) so as to treat the exhaust gas discharged from the vacuum pump (1) for zero harm. In the abatement section (10), an exhaust gas introduction port for target exhaust gas introduction is formed on one end portion side of a cylindrical body (11) and a gas outlet for treated gas discharge is formed on the other end portion side, a plurality of fuel nozzles (16) for fuel injection are disposed in a circumferential wall of the cylindrical body (11), a plurality of air nozzles (15) are disposed in the circumferential wall of the cylindrical body so that the air is injected to form a vortex along an inner circumferential surface of the circumferential wall, and the air nozzles (15) are arranged in a plurality of steps at a gap in an axial direction of the cylindrical body.</p> |
