| 摘要 |
The present invention provides an apparatus for monitoring the tension of a wire saw, capable of monitoring the abrasion of a wire in a first row, which is generated from main rollers, and the tension of the wire generated between the main rollers to prevent the wire wound around the main rollers for the running thereof from being disconnected from each other and to determine the time to replace the wire, and a wire saw using the same. According to the present invention, the wire saw includes: a plurality of main rollers arranged in parallel to each other; an ingot feeding driver to feed an ingot between the main rollers; and a wire introduced into the main rollers from the outside, wound in multiple rows, running so that the ingot is cut in the form of multiple wafers, and running to deviate from the main rollers after the running process. The wire saw includes a tension measuring unit to measure the tension of the wires provided in a second row from one side and a second row from the other side among the multiple rows other than the row having a wire sagged due to the feeding of the ingot, and a controller to receive a measurement value of the tension measuring unit, to compare the measurement value with a reference value, and to output the comparison result. |
